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마이크로웨이브 플라즈마 버너를 이용한 불화 가스 분해와 화학 및 생물 독가스 제독
- Alternative Title
- Dong Hun Shin
- Author(s)
- 신동훈
- Alternative Author(s)
- Dong Hun Shin
- Advisor
- 엄환섭
- Department
- 일반대학원 분자과학기술학과
- Publisher
- The Graduate School, Ajou University
- Publication Year
- 2006-08
- Language
- eng
- Keyword
- Purification; Microwave Plasma; Plasma Burner
- Alternative Abstract
- An apparatus for generating flames and more particularly the microwave plasma-burner for generating high-temperature large-volume plasma flame was presented. The plasma-burner is operated by injecting liquid hydrocarbon-fuels into a microwave plasma torch in air discharge and by mixing the resultant gaseous hydrogen and carbon compounds with air or oxygen gas. The microwave plasma torch can instantaneously vaporize and decompose the hydrogen and carbon containing fuels. It was observed that the flame volume of the burner was more than 50 times that of the torch plasma. While the temperature of the torch plasma flame was only 550 K at a measurement point, that of the plasma-burner flame with the addition of 0.025 lpm kerosene and 20 lpm oxygen drastically increased to about 1850 K. A preliminary experiment was carried out, measuring the temperature profiles of flames along the radial and axial directions. A microwave plasma burner was presented as a tool for abating fluorinated compounds (FCs), which are the global warming gases emitted mainly from semiconductor industries. The microwave plasma burner consists of a fuel injector and a reactor connected in series to a microwave plasma torch. In this work, methane (CH4) as a fuel was injected into the microwave plasma torch for generating an enlarged high-temperature plasma flame. A mixture of nitrogen and FC gases was introduced into the fuel injector and oxygen gas was added to the mixture. Abatement of FC gases was conducted in terms of destruction and removal efficiency (DRE) for different nitrogen flow rates. The plasma burner generated at 1.4 kW plasma power and 15 liters per minute (lpm) CH4 achieved DREs > 99.9% for NF3 in 400 lpm nitrogen and SF6 in 120 lpm nitrogen. Also, the plasma burner abated 94.7% of CF4 concentration in 60 lpm nitrogen. Finally, the experimental results presented in this work show that the microwave plasma burner can successfully eliminate FCs discharged from the semiconductor industries. A kerosene microwave plasma burner was presented as a tool for abatement of SF6 and CF4 gases. The plasma burner operates by injecting kerosene as a liquid hydrocarbon fuel into a microwave plasma torch and by mixing the resultant gaseous hydrogen and carbon compounds with air or oxygen gas. The destruction and removal efficiencies of the burner were achieved up to 99.9999% for 0.1 liters per minute SF6 in 120 lpm N2 and 99.3% for 0.05 lpm CF4 in 60 lpm N2, revealing that the plasma burner can effectively eliminate fluorinated gases emitted from the semiconductor industries. An elimination of airborne simulated-chemical and biological warfare agents was carried out by making use of a plasma flame made of atmospheric plasma and a fuel-burning flame, which can purify the interior air of a large volume in isolated spaces such as buildings, public transportation systems, and military vehicles. The plasma flame generator consists of a microwave plasma torch connected in series to a fuel injector and a reaction chamber. For example, a reaction chamber, with the dimensions of a 22 cm diameter and 30 cm length, purifies an airflow rate of 5,000 liters per minute contaminated with toluene, the simulated chemical agent, and soot from a diesel engine, the simulated aerosol for biological agents. Large volumes of purification by the plasma flame will free the mankind from the threat of the airborne warfare agents. The plasma flame may also effectively purify air that is contaminated with volatile organic compounds, in addition to eliminating soot from diesel engines as an environmental application.
- Fulltext
- Appears in Collections:
- Graduate School of Ajou University > Department of Molecular Science and Technology > 3. Theses(Master)
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