GaN 박막 성장에서 광 간섭계를 이용한 실시간 두께측정

Author(s)
박현우
Advisor
이해영
Department
산업대학원 정보전자공학과
Publisher
The Graduate School, Ajou University
Publication Year
2001
Language
kor
URI
https://dspace.ajou.ac.kr/handle/2018.oak/4023
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Special Graduate Schools > Graduate School of Science and Technology > Department of Information and Electronics Engineering > 3. Theses(Master)
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