GaN 박막 성장에서 광 간섭계를 이용한 실시간 두께측정

DC Field Value Language
dc.contributor.advisor이해영-
dc.contributor.author박현우-
dc.date.accessioned2018-11-08T06:50:40Z-
dc.date.available2018-11-08T06:50:40Z-
dc.date.issued2001-
dc.identifier.other7298-
dc.identifier.urihttps://dspace.ajou.ac.kr/handle/2018.oak/4023-
dc.description학위논문(석사)--아주대학교 산업대학원 :정보전자공학과,2001-
dc.language.isokor-
dc.publisherThe Graduate School, Ajou University-
dc.rights아주대학교 논문은 저작권에 의해 보호받습니다.-
dc.titleGaN 박막 성장에서 광 간섭계를 이용한 실시간 두께측정-
dc.typeThesis-
dc.contributor.affiliation아주대학교 산업대학원-
dc.contributor.department산업대학원 정보전자공학과-
dc.date.awarded2001. 2-
dc.description.degreeMaster-
dc.identifier.localId561313-
dc.identifier.urlhttp://dcoll.ajou.ac.kr:9080/dcollection/jsp/common/DcLoOrgPer.jsp?sItemId=000000007298-
Appears in Collections:
Special Graduate Schools > Graduate School of Science and Technology > Department of Information and Electronics Engineering > 3. Theses(Master)
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