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PECVD 법에 의한 DLC 박막 중착시 생성되는 플라즈마의 OES 분석
- Author(s)
- 강신규
- Advisor
- 진억용
- Department
- 일반대학원 재료공학과
- Publisher
- The Graduate School, Ajou University
- Publication Year
- 2000
- Language
- kor
- Fulltext
- Appears in Collections:
- Graduate School of Ajou University > Department of Material Engineering > 3. Theses(Master)
- Files in This Item:
- There are no files associated with this item.
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