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PECVD 법에 의한 DLC 박막 중착시 생성되는 플라즈마의 OES 분석
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 진억용 | - |
| dc.contributor.author | 강신규 | - |
| dc.date.accessioned | 2018-11-08T05:07:48Z | - |
| dc.date.available | 2018-11-08T05:07:48Z | - |
| dc.date.issued | 2000 | - |
| dc.identifier.other | 4915 | - |
| dc.identifier.uri | https://dspace.ajou.ac.kr/handle/2018.oak/2225 | - |
| dc.description | 학위논문(석사)--아주대학교 대학원 :재료공학과,2000 | - |
| dc.description.tableofcontents | text | - |
| dc.language.iso | kor | - |
| dc.publisher | The Graduate School, Ajou University | - |
| dc.rights | 아주대학교 논문은 저작권에 의해 보호받습니다. | - |
| dc.title | PECVD 법에 의한 DLC 박막 중착시 생성되는 플라즈마의 OES 분석 | - |
| dc.type | Thesis | - |
| dc.contributor.affiliation | 아주대학교 일반대학원 | - |
| dc.contributor.department | 일반대학원 재료공학과 | - |
| dc.date.awarded | 2000. 2 | - |
| dc.description.degree | Master | - |
| dc.identifier.localId | 560163 | - |
| dc.identifier.url | http://dcoll.ajou.ac.kr:9080/dcollection/jsp/common/DcLoOrgPer.jsp?sItemId=000000004915 | - |
- Appears in Collections:
- Graduate School of Ajou University > Department of Material Engineering > 3. Theses(Master)
- Files in This Item:
- There are no files associated with this item.
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