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MOCVD를 이용한 GaN, AlGaN, InGaN 및 SnO2 박막의 증착메커니즘과 속도식
- Author(s)
- 김준현
- Advisor
- 김창구
- Department
- 일반대학원 에너지시스템학부
- Publisher
- The Graduate School, Ajou University
- Publication Year
- 2013-02
- Language
- kor
- Keyword
- MOCVD; GaN; AlGaN; InGaN; SnO2; deposition kinetics; deposition mechanism
- Fulltext
- Appears in Collections:
- Graduate School of Ajou University > Department of Energy Systems > 3. Theses(Master)
- Files in This Item:
- There are no files associated with this item.
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