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유기금속화합물 단일전구체를 이용한 Aluminum Nitride 박막증착
- Author(s)
- 경제홍
- Advisor
- 최승철
- Department
- 일반대학원 재료공학과
- Publisher
- The Graduate School, Ajou University
- Publication Year
- 2000
- Language
- kor
- Fulltext
- Appears in Collections:
- Graduate School of Ajou University > Department of Material Engineering > 3. Theses(Master)
- Files in This Item:
- There are no files associated with this item.
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