반도체 GOX 공정에서의 지분 관리도 적용 연구 : Batch Process 관리를 중심으로

Author(s)
차명선
Advisor
장중순
Department
산업대학원 산업공학과
Publisher
The Graduate School, Ajou University
Publication Year
2003
Language
kor
URI
https://dspace.ajou.ac.kr/handle/2018.oak/15999
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Special Graduate Schools > Graduate School of Engineering > Department of Industrial Systems Engineering > 3. Theses(Master)
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