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전극재료에 따른 대기압 플라즈마 방전특성
- Alternative Title
- Kong, Hyun Gu
- Author(s)
- 공현구
- Alternative Author(s)
- Kong, Hyun Gu
- Advisor
- 양상식
- Department
- 일반대학원 전자공학과
- Publisher
- The Graduate School, Ajou University
- Publication Year
- 2019-08
- Language
- kor
- Alternative Abstract
- Electrodes in atmospheric-pressure plasma dispensing devices are essential for plasma generation. Depending on the material of the electrode, the discharge characteristics of the plasma and the amount of the active species may vary. Recently, studies on the generation volume and rate of active species are ongoing through changes in the material and structure of electrodes in atmospheric pressure plasma. In this paper, three types of plasma electrodes with different materials were developed to improve the life and discharge area of plasma discharged through the Atmosperic pressure plasma jet used in this lab. The first electrode was made using a p+silicon wafer with boron doped. The second electrode was made using stainless steel substrates, and the third electrode was made by ceramic coating on to the stainless steel electrode. All electrodes are made using a micro-machining process. The experiment was conducted using air gas and nitrogen gas. In addition, the experiment identified the generation volume of active species using UV-intensity and The experiment was conducted using air gas and nitrogen gas. In addition, the experiment identified the generation volume of active species using UV intensity and Optical emission spectrum measurements of plasma, which are discharged according to the materials of gas and electrodes, also we measured the power consumption generated during the experiment according to each gas and electrode. In addition, the amount of Ozone and NO generated during the experiment was measured to determine if plasma jets could be applied to the medical-biological field. Finally, through experiments, we could compare the life time for each electrode by checking how uniform and stable discharge for each of the three electrodes produced using different materials is sustained during plasma injection.
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- Appears in Collections:
- Graduate School of Ajou University > Department of Electronic Engineering > 3. Theses(Master)
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