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중공 음극 구조를 갖는 미세가공 대기압 방전 소자
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 양상식 | - |
| dc.contributor.author | Geun Young Kim | - |
| dc.date.accessioned | 2018-11-08T07:52:30Z | - |
| dc.date.available | 2018-11-08T07:52:30Z | - |
| dc.date.issued | 2012-02 | - |
| dc.identifier.other | 12415 | - |
| dc.identifier.uri | https://dspace.ajou.ac.kr/handle/2018.oak/8397 | - |
| dc.description | 학위논문(박사)아주대학교 일반대학원 :전자공학과,2012. 2 | - |
| dc.description.tableofcontents | 1. CHAPTER I INTRODUCTION 1 1.1 Motivation 2 1.2 Overview of glow discharges 5 1.2.1 Basic operating mechanism 5 1.2.2 Electrical discharge regimes 9 1.2.3 Paschen’s Law 11 1.3 Types of microdischarges 18 1.3.1 DC and Hollow cathode discharges 20 1.3.2 Dielectric barrier discharges 23 1.3.3 Corona discharges 24 1.4 Research objectives 24 2. CHAPTER II HOLE TYPE DEVICE 25 2.1 Preliminary test for fabrication 26 2.2 Design of the device 29 2.3 Simulations 31 2.3.1 Simulation using COMSOL Multiphysics 31 2.3.2 Geometry for simulations 32 2.3.3 Simulations results 33 2.4 Fabrication 29 2.5 Experimental setup 43 2.6 Results and discussion 45 2.7 Conclusions 49 3. CHAPTER III HOLLOW CATHODE TYPE DEVICE 51 3.1 Design of the device 52 3.2 Simulations 54 3.2.1 Geometry 54 3.2.2 Simulation results 54 3.3 Fabrication 61 3.4 Experimental setup 65 3.5 Results and discussion 66 3.6 Conclusions 73 4. CHAPTER IV HOLE CATHODE TYPE DEVICE 75 4.1 Design of the device 76 4.2 Simulations 78 4.2.1 Geometry 78 4.2.2 Simulation results 78 4.3 Fabrication 84 4.4 Results and discussion 87 4.4.1 The fabricated device structure 87 4.4.2 Discharge tests of DC excitation 90 4.4.3 Discharge tests of AC excitation 92 4.5 Conclusions 98 5. CHAPTER V DEGRADATION OF ELECTRODES 99 5.1 Lifetime of devices 100 5.2 Damages of electrodes 100 6. CHAPTER VI SUMMARY AND OUTLOOK 107 REFERENCES 110 APPENDIX 117 PUBLICATION LIST 123 ACKNOWLEDGEMENTS 127 | - |
| dc.language.iso | eng | - |
| dc.publisher | The Graduate School, Ajou University | - |
| dc.rights | 아주대학교 논문은 저작권에 의해 보호받습니다. | - |
| dc.title | 중공 음극 구조를 갖는 미세가공 대기압 방전 소자 | - |
| dc.title.alternative | Geunyoung Kim | - |
| dc.type | Thesis | - |
| dc.contributor.affiliation | 아주대학교 일반대학원 | - |
| dc.contributor.alternativeName | Geunyoung Kim | - |
| dc.contributor.department | 일반대학원 전자공학과 | - |
| dc.date.awarded | 2012. 2 | - |
| dc.description.degree | Master | - |
| dc.identifier.localId | 569878 | - |
| dc.identifier.url | http://dcoll.ajou.ac.kr:9080/dcollection/jsp/common/DcLoOrgPer.jsp?sItemId=000000012415 | - |
| dc.subject.keyword | microdischarge | - |
| dc.subject.keyword | micromachining | - |
| dc.description.alternativeAbstract | This thesis presents atmospheric pressure microplasma devices with hollow cathode structures. The microplasma is used to refer to discharges with dimensions ranging from a few micrometers to a few millimeters. Atmospheric-pressure plasmas have many applications such as thin film deposition, surface modification, light sources and bio-medical treatment. Microdischarge devices for atmospheric-pressure plasmas can be fabricated using micromachining technology. If the size is reduced, the high-pressure operation is possible. Micromachining technology can make it possible to accomplish this by reducing the hole diameter. Discharge devices with flexible hollow cathode structures were fabricated. The discharge device consists of three layers; an anode layer, an insulation layer and a hollow cathode layer. Hollow cathode discharges have the unique characteristics of a high current density compared with planar electrode discharges. It is considered that the main mechanism for the high current density is assumed to be the oscillatory motion of electrons between the opposite cathode fall regions of the hollow cathode. Discharge devices are fabricated by micromachining technology. Two types of discharge devices were fabricated for DC excitation; a hole type and a hollow cathode type. And the device of a hole cathode type is fabricated for AC excitation. First, the discharge device of a hole type with a thin anode layer was fabricated for DC excitation. The discharge device is composed of a thin anode, an insulator and a hollow cathode. The anode and hollow cathode are made of aluminum and nickel, respectively. Polyimide is chosen as an insulating material because of its excellent dielectric properties and good mechanical stability. The device has an array of 7 ？e 11 holes for the emission. The diameter of holes is 70 ？？m. The size of the flexible discharge device is 20 mm ？e 10 mm ？e 0.05 mm. The discharge test was performed in argon gas atmosphere at room temperature. For the apply voltage ranging from 230 to 280 V, the emission was observed. Second, the device of a hollow cathode type was fabricated for DC excitation. The anode and hollow cathode of the device are made of aluminum and nickel, respectively. The insulation layer is polyimide. The hole diameter and depth are 70 and 110 ？？m, respectively. The size of the discharge device is 9 ？e 9 ？e 0.13 mm3. The discharge test was performed in an argon gas chamber at room temperature. The discharge occurs when a voltage is applied between the anode and cathode. The current is measured during the discharge at various applied voltages. The discharge is observed at atmospheric pressure. Finally, the discharge device of a hole cathode type for AC excitation was fabricated and tested. The device consists of insulator between two nickel electrodes. The nickel anode is chosen for an improved lifetime compared to that of an aluminum electrode. The size of the device is 20 mm ？e 10 mm ？e 0.08 mm. The device has an array of 10 ？e 10 holes for the discharge. The hole diameter and depth are 100 and 40 ？？m, respectively. The size of the microdischarge device is 20 ？e 10 ？e 0.08 mm3. The discharge test was performed in an argon gas chamber at room temperature. The device is operated by AC voltage because it is useful for simultaneous operation of holes. Discharges of 87 holes are observed This study using the micro discharge device could be useful in various applications. The devices of three hollow cathode structures were fabricated using micromachining technology. The discharge of the fabricated devices was observed at atmospheric pressure. | - |
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