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비정질 고분자를 이용한 마이크로 열간 임프린팅 종정에 대한 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이문구 | - |
| dc.contributor.author | Lan, Shuhuai | - |
| dc.date.accessioned | 2019-10-21T07:11:54Z | - |
| dc.date.available | 2019-10-21T07:11:54Z | - |
| dc.date.issued | 2009-08 | - |
| dc.identifier.other | 10141 | - |
| dc.identifier.uri | https://dspace.ajou.ac.kr/handle/2018.oak/17147 | - |
| dc.description | 학위논문(박사)--아주대학교 일반대학원 :기계공학과,2009. 8 | - |
| dc.description.tableofcontents | TABLE OF CONTENTS ABASTRACT i TABLE OF CONTENTS iii LIST OF FIG-URES vi LIST OF TABLES x CHAPTER 1 INTRODUCTION AND BACK-GROUND 1 1.1 Genral introduction and back-ground 1 1.2 Polymer based process in micro fabrication 2 1.3 Micro thermal imprint process for pattern replication of amorphous polymer 3 1.4 Motivation and objective 7 1.5 Scope of study 8 CHAPTER 2 LITERATURE SURVEY STUDY 10 2.1 Nanoimprint lithography process 10 2.2 State-of-the-art of micro thermal imprint process based on amorph-ous polymer 11 2.2.1 Process development and application in various areas 13 2.2.2 Material flow behavior and Process analysis 25 2.2.3 Mold fabrication 33 2.2.4 FEM numerical simulation of the process 34 2.2.5 Roller-type micro thermal imprint for large area pattern repli-cation 37 2.3 Summary 41 CHAPTER 3 MATERIAL PROPERTY OF GLASSY POLYMER NEAR THE GLASSY TRANSITION TERMPERA-TURE 43 3.1 Introduction of viscoelatic property of glassy polymer near the glass transition temperature 43 3.1.1 Three stages of amorphous polymer material deformation 44 3.1.2 Time dependence based on viscoelastic “mechanical analogy” model 46 3.1.3 Time-temperature correspondence 48 3.2 Experiment study of material behavior near glassy transition tem-perature 50 3.2.1 Experiment setup and sample preparation 50 3.2.2 Tensile stress relaxation test 52 CHAPTER 4 FLAT TYPE MICRO THERMAL IMPRINT PROCESS 57 4.1 Introduc-tion 57 4.2 Experimental work 58 4.2.1 Experiment setup 58 4.2.2 Substrate and mold 61 4.2.3 Process condition design 63 4.2.4 Experiment result measurement 65 4.3 Results and discussion 67 4.3.1 Experimental study of replication of semi-pyramidal pat-tern 67 4.3.1.1 Process analysis based on Taguchi method 69 4.3.2 Numerical study of micro thermal imprint process 77 4.3.2.1 FE model development 77 4.3.2.2 Parametric study of thermal imprint process 79 4.4 Summary 82 CHAPTER 5 FLAT TYPE MICRO THERMAL IMPRINT PROCESS 84 5.1 Introduc-tion 84 5.2 System development and process design 85 5.2.1 Development of Roll-to-Flat micro thermal imprint sys-tem 85 5.2.2 Process design and control parameters 88 5.3 Roll-to-Flat thermal imprint process for large area micro pattern replication 90 5.3.1 Flat mold and substrate preparation 90 5.3.2 Experiment result 91 5.4 Analysis of Roll-to-Flat thermal imprint process 95 5.4.1 Process parameter study 95 5.4.2 Investigation of replication uniformity 99 5.5 Discussion 100 5.6 Summary 101 CHAPTER 6 CONCLUSION AND FUTURE WORK 102 6.1 Conclusions 102 6.2 Future works 104 BIBLIOGRAPHY 106 | - |
| dc.language.iso | eng | - |
| dc.publisher | The Graduate School, Ajou University | - |
| dc.rights | 아주대학교 논문은 저작권에 의해 보호받습니다. | - |
| dc.title | 비정질 고분자를 이용한 마이크로 열간 임프린팅 종정에 대한 연구 | - |
| dc.title.alternative | Shuhuai Lan | - |
| dc.type | Thesis | - |
| dc.contributor.affiliation | 아주대학교 일반대학원 | - |
| dc.contributor.alternativeName | Shuhuai Lan | - |
| dc.contributor.department | 일반대학원 기계공학과 | - |
| dc.date.awarded | 2009. 8 | - |
| dc.description.degree | Master | - |
| dc.identifier.localId | 567976 | - |
| dc.identifier.url | http://dcoll.ajou.ac.kr:9080/dcollection/jsp/common/DcLoOrgPer.jsp?sItemId=000000010141 | - |
| dc.subject.keyword | 비정질 | - |
| dc.subject.keyword | 고분자 | - |
| dc.subject.keyword | 마이크로 | - |
| dc.subject.keyword | 열간 | - |
| dc.subject.keyword | 임프린팅 | - |
| dc.subject.keyword | 연구 | - |
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- Graduate School of Ajou University > Department of Mechanical Engineering > 3. Theses(Master)
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