Browsing byKeyword : plasma etch

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
or enter first few letters:
  • Sort by:
  • In order:
  • Results/Page
  • Authors/Record:

Showing results 1 to 1 of 1

Issue DateTitleAuthor(s)
2019-02Etching of Si-based materials using fluorocarbon plasmas : Etch characteristics and its applications김준현
1

Browse